A Novel Method for Angular Vibration Calibration Based on a Retroreflection Film Laser Interferometer and a Rotary Encoder
J. Zhou, W. He and Y-N. Yu
A high accuracy method of angular vibration measurement based on a retroreflection film He-Ne laser interferometer and rotary encoder is proposed for the angular vibration calibration. The retroreflection film interferometer is applied at higher frequencies for smaller angle vibration measurement, while the rotary encoder is used at lower frequencies for wider angle vibration measurement. The measurement principle of the retroreflection film interferometer and the rotary encoder are theoretically analysed according to the different vibration frequencies and different vibration angles, and the experimental results from the proposed method have a good consistence with that from the traditional diffraction grating interferometer method in the primary angular vibration calibration. The proposed method presents several advantages in comparison to the diffraction grating interferometer method, including the lower frequency range, the much lower cost, the convenience and flexibility of the use.
Keywords: He-Ne laser interferometer, retroreflection film, diffraction grating, rotary encoder, angular vibration calibration