Design, Simulation and Optimization of MEMS-based Piezoresistive Biosensor with Stress Concentration Region for Biosensing Applications
Rambabu Busi, Satyanarayana Talam, Ch. Karthikeya Reddy, T. Ashok Reddy, R. Gowtham Arun Kumar R. Naveen, Ch. Jyothiram and M. Harshada
The present paper explores the optimization of Piezoresistive cantilevers by introducing Stress Concentrated Regions (SCR) made of pierced objects of different geometries (Spherical, Rectangle, and T-shape). The objective is to improve displacement sensitivity by investigating applied loads, material additions, and geometric changes. Simulations are performed with COMSOL v 5.2a to examine cantilever deformation in various scenarios. The effects of using several piezoresistive materials in addition to the aluminium base layer are compared in the study, with a special emphasis on silicon oxide and silicon carbide (SiC). Our results demonstrate the better deformation and sensitivity of the SiC-based MEMS piezoresistive cantilever, which we give to dimensional adjustments, applied stresses, and material attributes. This work provides insights into the optimization of cantilever designs, which are important for enhancing sensitivity in piezoresistive readout systems and for applications like the detection of minute biological mass changes. It also clarifies the possible application of piezoresistive cantilevers in biochemical sensing, a field characterized by surface stress loading conditions.
Keywords: Cantilever, deformation, COMSOL V 5.2a, piezoresistive